5. 正常ヒトヘモグロビンの構造および機能 structure and function of normal human hemoglobins
Japanese Journal
C_8F_<18>プラズマCVDによる非晶質フッ化炭素低誘電率絶縁膜の波状構造積層堆積
水野 巧一朗,菅原 広剛,村山 明宏
電気学会論文誌. A, 基礎・材料・共通部門誌 = The transactions of the Institute of Electrical Engineers of Japan. A, A publication of Fundamentals and Materials Society 130(4), 319-324, 2010-04-01
We have composed amorphous fluorocarbon (a-C:F) polymer films, which are low-k insulators, by plasma-enhanced chemical vapor deposition using C8F18 as the feedstock. In our previous attempts to form m …